Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

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PDF) Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma - ScienceDirect

Silicone encapsulation of thin-film SiOx, SiOxNyand SiC for modern electronic medical implants: a comparative long-term ageing study. - Abstract - Europe PMC

PDF] Moisture Resistance of Insulating Films for Compound Semiconductor Devices

Classification of the Categories of Amorphous Hydrogenated Silicon Oxynitride Films Using Infrared Spectroscopy

Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma - ScienceDirect

Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma - ScienceDirect

Conformal growth and characterization of hafnium silicate thin film by MOCVD using HTB (hafnium tertra-tert-butoxide) and TDEAS (tetrakis-diethylamino silane)

PDF] Diffusion of Water Molecules in Amorphous Silica

PDF] Moisture Resistance of Insulating Films for Compound Semiconductor Devices

PDF] Diffusion of Water Molecules in Amorphous Silica

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